Dreidimensionale elektrische Antastung für die Mikro- und Nanokoordinatenmesstechnik - 3-D-Tunnelstromtaster (3-D-Tunnelstromtaster)

Third party funded individual grant

Acronym: 3-D-Tunnelstromtaster

Start date : 01.01.2013

End date : 01.03.2017

Overview

Publications

(4)

Development of a 3D capable probing system based on electrical near-field interactions for micro- and nano-coordinate metrology (2016) Sun Z, Hausotte T Conference contribution, Conference Contribution Development of a 3D tunneling current probing system for micro- and nano-coordinate metrology (2015) Sun Z, Schuler A, Hausotte T Conference contribution, Conference Contribution Micro- and nanocoordinate measurements of micro-parts with 3-D tunnelling current probing (2015) Schuler A, Hausotte T, Sun Z Journal article, Review article Update on a 3D probing system based on electrical near-field interaction for micro- and nano-coordinate metrology (2015) Sun Z, Schuler A, Hausotte T Conference contribution, Abstract of lecture