Fabrication and Characterization of SiGeSn "Pillar" MOSFETs

Internally funded project


Start date : 01.01.2022

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Types of publications

Journal article
Book chapter / Article in edited volumes
Authored book
Translation
Thesis
Edited Volume
Conference contribution
Other publication type
Unpublished / Preprint

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Abstract

Journal

Optimierung von Lithographieprozessen auf Germaniumoberflächen zur Herstellung von Nanodrähten (2022) Jena S Thesis