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Shouzhong Wang
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Professur für Werkstoffwissenschaften (Werkstoffe der Elektrotechnik)
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Fabrication of SiC-on-Insulator (SiCOI) Layers by Chemical Vapor Deposition of 3C-SiC on Si-in-Insulator Substrates at Low Deposition Temperatures of 1120 °C (2023)
Steiner J, Schultheiß J, Wang S, Wellmann P
Journal article