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Hazem Mohamed Safwat Mesilhy
List of publications:
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Lehrstuhl für Elektronische Bauelemente
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(1)
Publications
(2)
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Journal article
Journal article
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Book chapter / Article in edited volumes
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Authored book
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Conference contribution
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Simulation study on EUV multilayer polarization effects (2021)
Bilalaj L, Mesilhy HMS, Erdmann A
Conference contribution
Attenuated phase shift mask for extreme ultraviolet: Can they mitigate three-dimensional mask effects? (2019)
Erdmann A, Evanschitzky P, Mesilhy HMS, Philipsen V, Hendrickx E, Bauer M
Journal article