LAYERTEC GmbH
Industry / private company
Location:
Mellingen,
Germany (DE)
Heterostructure Films of SiO2 and HfO2 for High-Power Laser Optics Prepared by Plasma-Enhanced Atomic Layer Deposition (2023)
Alam S, Paul P, Beladiya V, Schmitt P, Stenzel O, Trost M, Wilbrandt S, et al.
Journal article
Influence of temperature and plasma parameters on the properties of PEALD HfO2 (2021)
Lapteva M, Beladiya V, Riese S, Hanke P, Otto F, Fritz T, Schmitt P, et al.
Journal article