Synopsys

Industry / private company


Location: Aschheim/Dornach, Germany (DE) DE

ISNI: -

ROR: https://ror.org/021ztkr23

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Accurate prediction of EUV lithographic images and 3D mask effects using generative networks (2021) Awad A, Brendel P, Evanschitzky P, Woldeamanual DS, Rosskopf A, Erdmann A Journal article