Semiconductor Material Synthesis & Process Technology

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Third Party Funds Group - Overall project
Third Party Funds Group - Sub project
Third party funded individual grant
Internally funded project
FAU own research funding: EFI / IZKF / EAM ...
Non-FAU Project

Status

Project year

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To
Growth and Curvature Modelling of GaN-on-Si(111) for Vertical Power Devices Sept. 1, 2021 - Sept. 1, 2024 Novel development of a slurry-based spray coating technology to create a high temperature and corrosion resistant tantalum carbide protection coating for semiconductor material manufacturing and processing Sept. 1, 2021 - Sept. 1, 2024 Pathfinding the perfect EUV mask (EUV) Sept. 1, 2021 - Sept. 1, 2024 Modelling Nanomechanical Effects in Advanced Lithographic Materials and Processes Sept. 1, 2021 - Sept. 1, 2024 Deep learning applications for EUV lithographic imaging Feb. 1, 2021 - Feb. 1, 2024 Growth and stability of anisotropic nanoparticles in liquids (GRK1896-A2) In-situ Characterization of Nanomaterials with Electrons, X-rays/Neutrons and Scanning Probes (GRK 1896) Oct. 1, 2013 - Sept. 30, 2022 Entwicklung eines PDMS-basierten Mikrofluidiksystems Jan. 1, 2017 - Jan. 1, 2020