Semiconductor Material Synthesis & Process Technology
Growth and Curvature Modelling of GaN-on-Si(111) for Vertical Power Devices
Sept. 1, 2021 - Sept. 1, 2024
Novel development of a slurry-based spray coating technology to create a high temperature and corrosion resistant tantalum carbide protection coating for semiconductor material manufacturing and processing
Sept. 1, 2021 - Sept. 1, 2024
Pathfinding the perfect EUV mask (EUV)
Sept. 1, 2021 - Sept. 1, 2024
Modelling Nanomechanical Effects in Advanced Lithographic Materials and Processes
Sept. 1, 2021 - Sept. 1, 2024
Deep learning applications for EUV lithographic imaging
Feb. 1, 2021 - Feb. 1, 2024
Growth and stability of anisotropic nanoparticles in liquids (GRK1896-A2)
In-situ Characterization of Nanomaterials with Electrons, X-rays/Neutrons and Scanning Probes (GRK 1896)
Oct. 1, 2013 - Sept. 30, 2022
Entwicklung eines PDMS-basierten Mikrofluidiksystems
Jan. 1, 2017 - Jan. 1, 2020