Fabrication and Electrical Characterization of Pure Boron on 4H-SiC Junctions

Wimmer J, Dick J, Schulze J (2025)

Publication Language: English

Publication Type: Conference contribution

Publication year: 2025

Publisher: Institute of Electrical and Electronics Engineers Inc.

Pages Range: 1691-1696

Conference Proceedings Title: 2025 MIPRO 48th ICT and Electronics Convention

Event location: Opatija HR

ISBN: 979-8-3315-3598-8

DOI: 10.1109/MIPRO65660.2025.11132043

Abstract

In this work, the Boron-on-Silicon junction concept, which exhibits bipolar diode behavior, was transferred to Silicon Carbide (SiC). We focus on the electrical behavior of a 3 nm Boron layer on the hexagonal (0001) interface of 4H-SiC. The layer was evaporated at a substrate temperature of 300°C and subsequently encapsulated by an Aluminum layer. The as-deposited Boron-on-4H-SiC diodes show Schottky-behavior and a workfunction of 3.89 eV for Boron. Subsequent heat treatment above 500°C revealed characteristics comparable to merged-p-i-n-Schottky-diodes (MPS), which hints towards partial reconfiguration of the Boron-on-4H-SiC interface and bipolar behavior.

Authors with CRIS profile

Jan Dick Lehrstuhl für Elektronische Bauelemente Jörg Schulze Lehrstuhl für Elektronische Bauelemente

How to cite

APA:

Wimmer, J., Dick, J., & Schulze, J. (2025). Fabrication and Electrical Characterization of Pure Boron on 4H-SiC Junctions. In Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak (Eds.), 2025 MIPRO 48th ICT and Electronics Convention (pp. 1691-1696). Opatija, HR: Institute of Electrical and Electronics Engineers Inc..

MLA:

Wimmer, J., Jan Dick, and Jörg Schulze. "Fabrication and Electrical Characterization of Pure Boron on 4H-SiC Junctions." Proceedings of the 48th MIPRO ICT and Electronics Convention, MIPRO 2025, Opatija Ed. Snjezana Babic, Zeljka Car, Marina Cicin-Sain, Pavle Ergovic, Tihana Galina Grbac, Vera Gradisnik, Stjepan Gros, Alan Jovic, Darko Jurekovic, Tihomir Katulic, Marko Koricic, Vedran Mornar, Juraj Petrovic, Karolj Skala, Dejan Skvorc, Vlado Sruk, Edvard Tijan, Joe S. Valacich, Neven Vrcek, Boris Vrdoljak, Institute of Electrical and Electronics Engineers Inc., 2025. 1691-1696.

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