Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering

Zhang S, Bi T, Harder I, Ohletz O, Gannott F, Gumann A, Butzen E, Zhang Y, Del'haye P (2024)

Publication Type: Conference contribution

Publication year: 2024

Publisher: Institute of Electrical and Electronics Engineers Inc.

Conference Proceedings Title: 16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024

Event location: Incheon, KOR

ISBN: 9798350372076

DOI: 10.1109/CLEO-PR60912.2024.10676445

Abstract

Ultralow-loss silicon nitride on insulator films with high thickness are demonstrated with room temperature reactive sputtering. Microring resonators fabricated with said films reach optical Q-factors above 10 million after 800 °C thermal annealing.

Involved external institutions

Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE)

How to cite

APA:

Zhang, S., Bi, T., Harder, I., Ohletz, O., Gannott, F., Gumann, A.,... Del'haye, P. (2024). Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering. In 16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024. Incheon, KOR: Institute of Electrical and Electronics Engineers Inc..

MLA:

Zhang, Shuangyou, et al. "Ultralow-Loss Silicon Nitride Microresonators Using Room-Temperature Sputtering." Proceedings of the 16th Pacific Rim Conference on Lasers and Electro-Optics, CLEO-PR 2024, Incheon, KOR Institute of Electrical and Electronics Engineers Inc., 2024.

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