Ockel M, Funk F, Janisch L, Franke J (2024)
Publication Language: English
Publication Type: Book chapter / Article in edited volumes
Publication year: 2024
Publisher: Springer Nature Switzerland
Edited Volumes: Production at the Leading Edge of Technology. Proceedings of the 13th Congress of the German Academic Association for Production Technology (WGP), Freudenstadt, November 2023
Series: Lecture Notes in Production Engineering
City/Town: Cham
Pages Range: 417-427
ISBN: 978-3-031-47394-4
DOI: 10.1007/978-3-031-47394-4_41
The cold atmospheric plasma metallization (CAPM) with copper is an alternative coating process to electroplating for applying a thermo-mechanical buffer onto bare dies to enable more powerful top-side interconnection technologies for power electronics. A complete life cycle assessment (LCA) is to be performed in order to evaluate improvements to increase sustainability of the copper metallization. Since life cycle assessment results strongly depends on the set system boundaries and availability of primary data, the scope of this study is determined by the availability of the latter. Since the coating properties are dependent on the plasma spray parameters, a variation of set parameters is assessed, which are currently used for the coating of the bare dies. The evaluation showed that electricity, plasma gas and powder production have major impacts on the sustainability. The necessary heat treatment is responsible for on third of the emissions if bare die production and plasma coating are included into the assessment. Potential improvements are the reduction of total conveyed powder and carrier gas, as well as increasing the number of bare dies treated in one annealing process.
APA:
Ockel, M., Funk, F., Janisch, L., & Franke, J. (2024). Evaluation of the Cold Atmospheric Plasma Metallization of Bare Dies with Copper Through Life Cycle Assessment. In Thomas Bauernhansl, Alexander Verl, Mathias Liewald, Hans-Christian Möhring (Eds.), Production at the Leading Edge of Technology. Proceedings of the 13th Congress of the German Academic Association for Production Technology (WGP), Freudenstadt, November 2023. (pp. 417-427). Cham: Springer Nature Switzerland.
MLA:
Ockel, Manuela, et al. "Evaluation of the Cold Atmospheric Plasma Metallization of Bare Dies with Copper Through Life Cycle Assessment." Production at the Leading Edge of Technology. Proceedings of the 13th Congress of the German Academic Association for Production Technology (WGP), Freudenstadt, November 2023. Ed. Thomas Bauernhansl, Alexander Verl, Mathias Liewald, Hans-Christian Möhring, Cham: Springer Nature Switzerland, 2024. 417-427.
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