Towards integrated position sensors with nanometer precision

Schulz SA, Beck P, Wynne LC, Iadanza S, O'Faolain L, Banzer P (2023)

Publication Type: Conference contribution

Publication year: 2023

Publisher: SPIE

Book Volume: 12334

Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering

Event location: Birmingham, GBR

ISBN: 9781510657403

DOI: 10.1117/12.2644959

Abstract

The ability to precisely measure the displacement between two elements, e.g. a mask and a substrate or a beam and optical elements, is fundamental to many precision experiments and processes. Yet typical optical displacement sensors struggle to go significantly below the diffraction limit. Here we combine advances in our understanding of directional scattering from nanoparticles with silicon photonic waveguides to demonstrate a displacement sensor with deep subwavelength accuracy. Depending on the level of integration and waveguide geometry used we achieve a spatial resolution between 5 − 7 nm, equivalent to approximately λ/200 − λ/300.

Involved external institutions

University of St Andrews GB United Kingdom (GB) Max-Planck-Institut für die Physik des Lichts (MPL) / Max Planck Institute for the Science of Light DE Germany (DE) Munster Technological University (MTU) / Ollscoil Teicneolaíochta na Mumhan IE Ireland (IE)

How to cite

APA:

Schulz, S.A., Beck, P., Wynne, L.C., Iadanza, S., O'Faolain, L., & Banzer, P. (2023). Towards integrated position sensors with nanometer precision. In Callum G. Littlejohns, Marc Sorel (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. Birmingham, GBR: SPIE.

MLA:

Schulz, Sebastian A., et al. "Towards integrated position sensors with nanometer precision." Proceedings of the Emerging Applications in Silicon Photonics III 2022, Birmingham, GBR Ed. Callum G. Littlejohns, Marc Sorel, SPIE, 2023.

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