Optical coherence tomography with nanoscale axial resolution using a laser-driven high-harmonic source

Fuchs S, Wuesnsche M, Nathanael J, Abel JJ, Roedel C, Biedermann J, Reinhard J, Huebner U, Paulus GG (2017)

Publication Type: Journal article

Publication year: 2017

Journal

Optica Optical Society of America

Book Volume: 4

Pages Range: 903-906

Journal Issue: 8

DOI: 10.1364/OPTICA.4.000903

Abstract

Extreme ultraviolet microscopy is technologically demanding and thus largely confined to synchrotron radiation facilities. However, specific benefits like high resolution and exceptional material contrast provide strong motivation for the development of table-top alternatives. We report on the first demonstration of coherence tomography, i.e., noninvasive cross-sectional imaging, with high harmonics. A depth resolution of 24 nm and very good material contrast are achieved. Excessively demanding optics for extreme ultraviolet radiation are avoided and artifacts due to the elementary geometry are suppressed with a novel three-step one-dimensional phase-retrieval algorithm. The images are recorded in reflection geometry, facilitating the analysis of, e.g., operating semiconductor samples.

Involved external institutions

Friedrich-Schiller-Universität Jena DE Germany (DE) Leibniz-Institut für Photonische Technologien e.V. DE Germany (DE)

How to cite

APA:

Fuchs, S., Wuesnsche, M., Nathanael, J., Abel, J.J., Roedel, C., Biedermann, J.,... Paulus, G.G. (2017). Optical coherence tomography with nanoscale axial resolution using a laser-driven high-harmonic source. Optica, 4(8), 903-906. https://doi.org/10.1364/OPTICA.4.000903

MLA:

Fuchs, Silvio, et al. "Optical coherence tomography with nanoscale axial resolution using a laser-driven high-harmonic source." Optica 4.8 (2017): 903-906.

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