Beladiya , Faraz T, Kessels WMM, Tuennermann A, Szeghalmi A (2018)
Publication Type: Conference contribution
Publication year: 2018
Publisher: SPIE
Book Volume: 10691
Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering
Event location: Frankfurt, DEU
ISBN: 9781510619197
DOI: 10.1117/12.2312516
Complex interference multilayer systems typically implemented in high-performance optics consists of several layers of low and high refractive index materials. Low mechanical stress of the coatings is desired to avoid cracking and delamination of the film or a deformation of the substrate. It is known that the ion energies in plasma-assisted deposition can be employed to control material properties and thereby mechanical stress. In this study, we evaluate the influence of substrate biasing on mechanical stress and optical properties of alumina (Al
APA:
Beladiya, ., Faraz, T., Kessels, W.M.M., Tuennermann, A., & Szeghalmi, A. (2018). Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing. In Detlev Ristau, Michel Lequime, H. Angus Macleod (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. Frankfurt, DEU: SPIE.
MLA:
Beladiya, , et al. "Controlling mechanical, structural, and optical properties of Al2O3 thin films deposited by plasma-enhanced atomic layer deposition with substrate biasing." Proceedings of the Advances in Optical Thin Films VI 2018, Frankfurt, DEU Ed. Detlev Ristau, Michel Lequime, H. Angus Macleod, SPIE, 2018.
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