High resolution ptychographic coherent diffractive imaging using table-top XUV sources
Eschen W, Tadesse GK, Klas R, Tschernajew M, Tuitje F, Spielmann C, Tu¨nnermann A, Limpert J, Rothhardt J (2018)
Publication Type: Conference contribution
Publication year: 2018
Publisher: OSA - The Optical Society
Book Volume: Part F95-3D 2018
Conference Proceedings Title: Optics InfoBase Conference Papers
Event location: Orlando, FL, USA
ISBN: 9781557528209
Abstract
We present a coherent imaging setup for extended samples achieving record-high resolution for non-periodic samples. A Siemens star pattern is imaged and the Rayleigh criterion is used to provide a reliable sub-50 nm resolution claim.
Involved external institutions
Friedrich-Schiller-Universität Jena
Germany (DE)
Helmholtz-Institut Jena (HI-Jena) / Helmholtz Institute Jena
Germany (DE)
Germany (DE)
Helmholtz-Institut Jena (HI-Jena) / Helmholtz Institute Jena
Germany (DE)
How to cite
APA:
Eschen, W., Tadesse, G.K., Klas, R., Tschernajew, M., Tuitje, F., Spielmann, C.,... Rothhardt, J. (2018). High resolution ptychographic coherent diffractive imaging using table-top XUV sources. In Optics InfoBase Conference Papers. Orlando, FL, USA: OSA - The Optical Society.
MLA:
Eschen, W., et al. "High resolution ptychographic coherent diffractive imaging using table-top XUV sources." Proceedings of the 3D Image Acquisition and Display: Technology, Perception and Applications, 3D 2018, Orlando, FL, USA OSA - The Optical Society, 2018.
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