XUV coherence tomography with nanoscale resolution using one-dimensional phase retrieval
Fuchs S, Wünsche M, Nathanael J, Abel JJ, Reinhard J, Wiesner F, Skruszewicz S, Rödel C, Paulus GG (2019)
Publication Type: Conference contribution
Publication year: 2019
Publisher: OSA - The Optical Society
Conference Proceedings Title: Optics InfoBase Conference Papers
Event location: Bordeaux, FRA
ISBN: 9781943580590
Abstract
We present XUV Coherence Tomography (XCT) driven by a high-harmonic generation (HHG) light source. Using a novel one-dimensional phase retrieval algorithm, XCT enables non-destructive, artifact-free, nanoscale, cross-sectional imaging, of, e.g., semiconductor devices.
Involved external institutions
Germany (DE)How to cite
APA:
Fuchs, S., Wünsche, M., Nathanael, J., Abel, J.J., Reinhard, J., Wiesner, F.,... Paulus, G.G. (2019). XUV coherence tomography with nanoscale resolution using one-dimensional phase retrieval. In Optics InfoBase Conference Papers. Bordeaux, FRA: OSA - The Optical Society.
MLA:
Fuchs, Silvio, et al. "XUV coherence tomography with nanoscale resolution using one-dimensional phase retrieval." Proceedings of the 2019 Conference on Digital Holography and Three-Dimensional Imaging, DH 2019, Bordeaux, FRA OSA - The Optical Society, 2019.
BibTeX: Download