Label-free quantitative material sensitive tomography with extreme ultraviolet light
Wiesner F, Fuchs S, Wünsche M, Nathanael J, Abel JJ, Reinhard J, Skruszewicz S, Rödel C, Gawlik A, Schmidl G, Hübner U, Plentz J, Paulus GG (2019)
Publication Type: Conference contribution
Publication year: 2019
Publisher: OSA - The Optical Society
Conference Proceedings Title: Optics InfoBase Conference Papers
Event location: Bordeaux, FRA
ISBN: 9781943580590
Abstract
We report on quantitative material-sensitive cross-sectional imaging with nanoscale axial resolution. First experimental results show that in addition to the structural information element-specific identification of buried layers is possible.
Involved external institutions
Friedrich-Schiller-Universität Jena
Germany (DE)
Leibniz-Institut für Photonische Technologien e.V.
Germany (DE)
Germany (DE)
Leibniz-Institut für Photonische Technologien e.V.
Germany (DE)
How to cite
APA:
Wiesner, F., Fuchs, S., Wünsche, M., Nathanael, J., Abel, J.J., Reinhard, J.,... Paulus, G.G. (2019). Label-free quantitative material sensitive tomography with extreme ultraviolet light. In Optics InfoBase Conference Papers. Bordeaux, FRA: OSA - The Optical Society.
MLA:
Wiesner, Felix, et al. "Label-free quantitative material sensitive tomography with extreme ultraviolet light." Proceedings of the 2019 Conference on Digital Holography and Three-Dimensional Imaging, DH 2019, Bordeaux, FRA OSA - The Optical Society, 2019.
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