Influence of seed layers on optical properties of aluminum in the UV range
Stempfhuber S, Felde N, Schwinde S, Trost M, Schenk P, Schroeder S, Tuennermann A (2020)
Publication Type: Journal article
Publication year: 2020
Journal
Book Volume: 28
Pages Range: 20324-20333
Journal Issue: 14
DOI: 10.1364/OE.395638
Abstract
The potential of titanium and copper seed layers to enhance the optical properties of aluminum films for ultra-violet (UV) applications is analyzed. The seed layers significantly influence the initial layer growth of aluminum films. For the titanium-seeded aluminum, a surface roughness of 0.34 nm was observed. UV spectral reflectance measurements showed an average higher reflectivity of 4.8% for wavelengths from 120 nm to 200 nm for the aluminum film grown on the titanium seed layer. Furthermore, the titanium-seeded aluminum coatings were stable at an elevated temperature of 225°C and showed no increase in surface roughness or pinholes.
Involved external institutions
Germany (DE)How to cite
APA:
Stempfhuber, S., Felde, N., Schwinde, S., Trost, M., Schenk, P., Schroeder, S., & Tuennermann, A. (2020). Influence of seed layers on optical properties of aluminum in the UV range. Optics Express, 28(14), 20324-20333. https://dx.doi.org/10.1364/OE.395638
MLA:
Stempfhuber, Sven, et al. "Influence of seed layers on optical properties of aluminum in the UV range." Optics Express 28.14 (2020): 20324-20333.
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