Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces

Berzins J, Indrisiunas S, Fasold S, Steinert M, Zukovskaja O, Cialla-May D, Gecys P, Baumer SMB, Pertsch T, Setzpfandt F (2020)


Publication Type: Journal article

Publication year: 2020

Journal

Book Volume: 28

Pages Range: 1539-1553

Journal Issue: 2

DOI: 10.1364/OE.380383

Abstract

Optically resonant high-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances are usually fabricated by means of planar technologies, which limit the degrees of freedom in tunability and scalability of the fabricated systems. Therefore, we propose a complimentary post-processing technique based on ultrashort (≤ 10 ps) laser pulses. The process involves thermal effects: crystallization and reshaping, while the heat is localized by a high-precision positioning of the focused laser beam. Moreover, for the first time, the resonant behavior of dielectric metasurface elements is exploited to engineer a specific absorption profile, which leads to a spatially-selective heating and a customized modification. Such technique has the potential to reduce the complexity in the fabrication of non-uniform metasurface-based optical elements. Two distinct cases, a spatial pixelation of a large-scale metasurface and a height modification of metasurface elements, are explicitly demonstrated.

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How to cite

APA:

Berzins, J., Indrisiunas, S., Fasold, S., Steinert, M., Zukovskaja, O., Cialla-May, D.,... Setzpfandt, F. (2020). Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces. Optics Express, 28(2), 1539-1553. https://doi.org/10.1364/OE.380383

MLA:

Berzins, Jonas, et al. "Laser-induced spatially-selective tailoring of high-index dielectric metasurfaces." Optics Express 28.2 (2020): 1539-1553.

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