Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference
Berzins J, Indrisiunas S, Van Erve K, Nagarajan A, Fasold S, Steinert M, Gerini G, Gecys P, Pertsch T, Baumer SMB, Setzpfandt F (2020)
Publication Type: Journal article
Publication year: 2020
Journal
Book Volume: 14
Pages Range: 6138-6149
Journal Issue: 5
Abstract
High-index dielectric metasurfaces featuring Mie-type electric and magnetic resonances have been of great interest in a variety of applications such as imaging, sensing, photovoltaics, and others, which led to the necessity of an efficient large-scale fabrication technique. To address this, here we demonstrate the use of single-pulse laser interference for direct patterning of an amorphous silicon film into an array of Mie resonators a few hundred nanometers in diameter. The proposed technique is based on laser-interference-induced dewetting. A precise control of the laser pulse energy enables the fabrication of ordered dielectric metasurfaces in areas spanning tens of micrometers and consisting of thousands of hemispherical nanoparticles with a single laser shot. The fabricated nanoparticles exhibit a wavelength-dependent optical response with a strong electric dipole signature. Variation of the predeposited silicon film thickness allows tailoring of the resonances in the targeted visible and infrared spectral ranges. Such direct and high-throughput fabrication is a step toward a simple realization of spatially invariant metasurface-based devices.
Involved external institutions
Friedrich-Schiller-Universität Jena
Germany (DE)
State research institute Center for Physical Sciences and Technology
Lithuania (LT)
Netherlands Organization for Applied Scientific Research / Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek (TNO)
Netherlands (NL)
Germany (DE)
State research institute Center for Physical Sciences and Technology
Lithuania (LT)
Netherlands Organization for Applied Scientific Research / Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek (TNO)
Netherlands (NL)
How to cite
APA:
Berzins, J., Indrisiunas, S., Van Erve, K., Nagarajan, A., Fasold, S., Steinert, M.,... Setzpfandt, F. (2020). Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference. ACS nano, 14(5), 6138-6149. https://doi.org/10.1021/acsnano.0c01993
MLA:
Berzins, Jonas, et al. "Direct and High-Throughput Fabrication of Mie-Resonant Metasurfaces via Single-Pulse Laser Interference." ACS nano 14.5 (2020): 6138-6149.
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