Quantitative nanoscale coherence tomography with extreme ultraviolet light
Fuchs S, Wiesner F, Wunsche M, Nathanael J, Abel JJ, Reinhard J, Rodel C, Paulus GG (2020)
Publication Type: Conference contribution
Publication year: 2020
Publisher: The Optical Society
Conference Proceedings Title: Optics InfoBase Conference Papers
Event location: Washington, DC, USA
ISBN: 9781557528209
DOI: 10.1364/EUVXRAY.2020.EW3A.3
Abstract
We present nanoscale coherence tomography (XCT) in the extreme ultraviolet range driven by a high-harmonic generation (HHG) light source. Using a novel phase retrieval algorithm, XCT enables non-destructive, quantitative, cross-sectional imaging, of, e.g., semiconductor devices.
Involved external institutions
Germany (DE)How to cite
APA:
Fuchs, S., Wiesner, F., Wunsche, M., Nathanael, J., Abel, J.J., Reinhard, J.,... Paulus, G.G. (2020). Quantitative nanoscale coherence tomography with extreme ultraviolet light. In Optics InfoBase Conference Papers. Washington, DC, USA: The Optical Society.
MLA:
Fuchs, Silvio, et al. "Quantitative nanoscale coherence tomography with extreme ultraviolet light." Proceedings of the 2020 Compact EUV and X-ray Light Sources, EUVXRAY 2020 - Part of OSA High-Brightness Sources and Light-Driven Interactions Congress 2020, Washington, DC, USA The Optical Society, 2020.
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