Semiconductor-metal ultrafast laser welding with relocated filaments

Chambonneau M, Li Q, Fedorov VY, Blothe M, Tzortzakis S, Nolte S (2021)

Publication Type: Conference contribution

Publication year: 2021

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Publisher: SPIE

Book Volume: 11676

Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering

Event location: Virtual, Online, USA

ISBN: 9781510641877

DOI: 10.1117/12.2579220

Abstract

Ultrafast laser welding is a fast, clean, and contactless technique for joining a broad range of materials. Nevertheless, this technique cannot be applied for bonding semiconductors and metals. By investigating the nonlinear propagation of picosecond laser pulses in silicon, it is elucidated how the evolution of filaments during propagation prevents the energy deposition at the semiconductor-metal interface. While the restrictions imposed by nonlinear propagation effects in semiconductors usually inhibit countless applications, the possibility to perform semiconductor-metal ultrafast laser welding is demonstrated. This technique relies on the determination and the precompensation of the nonlinear focal shift for relocating filaments and thus optimizing the energy deposition at the interface between the materials. The resulting welds show remarkable shear joining strengths (up to 2.2 MPa) compatible with applications in microelectronics. Material analyses shed light on the physical mechanisms involved during the interaction.

Involved external institutions

Friedrich-Schiller-Universität Jena DE Germany (DE) Texas A&M University at Qatar (TAMUQ) / جامعة تكساس أي اند إم QA Qatar (QA)

How to cite

APA:

Chambonneau, M., Li, Q., Fedorov, V.Y., Blothe, M., Tzortzakis, S., & Nolte, S. (2021). Semiconductor-metal ultrafast laser welding with relocated filaments. In Peter R. Herman, Michel Meunier, Roberto Osellame (Eds.), Proceedings of SPIE - The International Society for Optical Engineering. Virtual, Online, USA: SPIE.

MLA:

Chambonneau, Maxime, et al. "Semiconductor-metal ultrafast laser welding with relocated filaments." Proceedings of the Frontiers in Ultrafast Optics: Biomedical, Scientific, and Industrial Applications XXI 2021, Virtual, Online, USA Ed. Peter R. Herman, Michel Meunier, Roberto Osellame, SPIE, 2021.

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