Design routine and characterisation of a biconic deformable metal mirror for focus shifting

Boettner P, Brady A, Reinlein C, Eberhardt R, Nolte S (2021)

Publication Type: Journal article

Publication year: 2021

Journal

Optics Express Optical Society of America

Book Volume: 29

Pages Range: 2971-2983

Journal Issue: 3

DOI: 10.1364/OE.408748

Abstract

This paper describes an opto-mechanical concept of a deformable metal mirror membrane, which can shift the focus position over a large range by use of a single actuator. The core element of the mirror is a diamond turned tulip-shaped membrane, the design is optimized to correct astigmatic aberrations which arise from the use of a curved mirror under a deflection angle. For this purpose, the target mirror surface is biconic. The manufactured mirror was tested with a maximum central deflection of 28 μm and, when used in combination with a 200 mm focal lens, is capable of producing a focus shift of up to 17.9 mm with a resulting wavefront aberration of 238.7 nm RMSerror.

Involved external institutions

Fraunhofer-Institut für Angewandte Optik und Feinmechanik (IOF) / Fraunhofer Institute for Applied Optics and Precision Engineering DE Germany (DE)

How to cite

APA:

Boettner, P., Brady, A., Reinlein, C., Eberhardt, R., & Nolte, S. (2021). Design routine and characterisation of a biconic deformable metal mirror for focus shifting. Optics Express, 29(3), 2971-2983. https://dx.doi.org/10.1364/OE.408748

MLA:

Boettner, Paul, et al. "Design routine and characterisation of a biconic deformable metal mirror for focus shifting." Optics Express 29.3 (2021): 2971-2983.

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