Table-top high-resolution ptychographic EUV imaging
Eschen W, Loetgering L, Schuster V, Klas R, Limpert J, Rothhardt J (2021)
Publication Type: Conference contribution
Publication year: 2021
Publisher: The Optical Society
Conference Proceedings Title: Optics InfoBase Conference Papers
Event location: Virtual, Online, USA
ISBN: 9781557528209
Abstract
Nanoscale imaging at 13.5 nm provides ideal opportunities for “at wavelength” metrology. We present a setup and the latest results on lensless ptychographic imaging at 92 eV achieving sub 30 nm resolution.
Involved external institutions
Helmholtz-Institut Jena (HI-Jena) / Helmholtz Institute Jena
Germany (DE)
Friedrich-Schiller-Universität Jena
Germany (DE)
Germany (DE)
Friedrich-Schiller-Universität Jena
Germany (DE)
How to cite
APA:
Eschen, W., Loetgering, L., Schuster, V., Klas, R., Limpert, J., & Rothhardt, J. (2021). Table-top high-resolution ptychographic EUV imaging. In Optics InfoBase Conference Papers. Virtual, Online, USA: The Optical Society.
MLA:
Eschen, W., et al. "Table-top high-resolution ptychographic EUV imaging." Proceedings of the Imaging Systems and Applications, ISA 2021 - Part of OSA Imaging and Applied Optics Congress 2021, Virtual, Online, USA The Optical Society, 2021.
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