Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers

Wu ZS, Parvez K, Feng X, Muellen K (2014)

Publication Type: Journal article

Publication year: 2014

Journal

Journal of Materials Chemistry A Royal Society of Chemistry

Book Volume: 2

Pages Range: 8288-8293

Journal Issue: 22

DOI: 10.1039/c4ta00958d

Abstract

Here we demonstrated the fabrication of ultrahigh rate, all-solid-state, planar interdigital graphene-based micro-supercapacitors (MSCs) manufactured by methane plasma-assisted reduction and photolithographic micro-fabrication of graphene oxide films on silicon wafers. Notably, the electrochemical performance of MSCs is significantly enhanced by increasing the number of the interdigital fingers from 8 to 32 and minimizing the finger width from 1175 to 219 μm, highlighting the critical importance of adjusting the number and widths of the fingers in the fabrication of high-performance MSCs. The fabricated graphene-based MSCs delivered an area capacitance of 116 μF cm^-2 and a stack capacitance of 25.9 F cm^-3. Furthermore, they offered a power density of 1270 W cm^-3 that is much higher than that of electrolytic capacitors, an energy density of ∼3.6 mW h cm^-3 that is comparable to that of lithium thin-film batteries, and a superior cycling stability of ∼98.5% capacitance retention after 50000 cycles. More importantly, the microdevice can operate well at an ultrahigh scan rate of up to 2000 V s^-1, which is three orders of magnitude higher than that of conventional supercapacitors. © 2014 the Partner Organisations.

Involved external institutions

Max-Planck-Institut für Polymerforschung (MPI-P) / Max Planck Institute for Polymer Research

Germany (DE)

How to cite

APA:

Wu, Z.-S., Parvez, K., Feng, X., & Muellen, K. (2014). Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers. Journal of Materials Chemistry A, 2(22), 8288-8293. https://doi.org/10.1039/c4ta00958d

MLA:

Wu, Zhong-Shuai, et al. "Photolithographic fabrication of high-performance all-solid-state graphene-based planar micro-supercapacitors with different interdigital fingers." Journal of Materials Chemistry A 2.22 (2014): 8288-8293.

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