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Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction

Espejo AP, Zierold R, Gooth J, Dendooven J, Detavernier C, Escrig J, Nielsch K (2016)

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Publication Type: Journal article

Publication year: 2016

Journal

Book Volume: 27

Article Number: 345707

Journal Issue: 34

DOI: 10.1088/0957-4484/27/34/345707

Abstract

Nickel-rich NiFe thin films (Ni92Fe8, Ni89Fe11 and Ni83Fe17) were prepared by combining atomic layer deposition (ALD) with a subsequent thermal reduction process. In order to obtain Ni x Fe1-xO y films, one ALD supercycle was performed according to the following sequence: m NiCp2/O3, with m = 1, 2 or 3, followed by one FeCp2/O3 cycle. The supercycle was repeated n times. The thermal reduction process in hydrogen atmosphere was investigated by in situ x-ray diffraction studies as a function of temperature. The metallic nickel iron alloy thin films were investigated and characterized with respect to crystallinity, morphology, resistivity, and magnetism. As proof-of-concept magnetic properties of an array of Ni83Fe17, close to the perfect Permalloy stoichiometry, nanotubes and an isolated tube were investigated.

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How to cite

APA:

Espejo, A.P., Zierold, R., Gooth, J., Dendooven, J., Detavernier, C., Escrig, J., & Nielsch, K. (2016). Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction. Nanotechnology, 27(34). https://doi.org/10.1088/0957-4484/27/34/345707

MLA:

Espejo, A. P., et al. "Magnetic and electrical characterization of nickel-rich NiFe thin films synthesized by atomic layer deposition and subsequent thermal reduction." Nanotechnology 27.34 (2016).

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