Time and space resolved investigations of confined fs ablation of Ta 2O5/Pt thin film systems

Rapp S, Rosenberger J, Domke M, Heise G, Schmidt M, Huber HP (2013)

Publication Type: Conference contribution

Publication year: 2013

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Book Volume: 8607

Conference Proceedings Title: Proceedings of SPIE - The International Society for Optical Engineering

Event location: USA

ISBN: 9780819493767

DOI: 10.1117/12.2002409

Abstract

Maskless patterning of biocompatible sensor chips consisting of a Ta 2O5/Pt/glass layer system can be realized by ultrashort laser pulse ablation allowing fast and precise structuring. Here, a 650 fs laser at a center wavelength of 1053 nm is used at a peak fluence of 5 J/cm 2. It was observed, that a greater diameter of the Pt film (400 nm) is ablated when it's coated with Ta2O5 (200 nm) compared to the uncoated Pt. One reason was found in the anti-reflective effect of the Ta2O5 layer causing an increase of energy deposition in the material. The underlying physical effects of the ablation reaction are investigated over the whole reaction time ranging temporally from fs to μs by ultrafast pump-probe microscopy. For the direct ablation of the uncoated Pt, results show ultrafast heating and melting after 2 ps, the creation of a gas-liquid mixture and plasma at 10 ps. At around 100 ns the actual ablation takes place indicated by the ejection of small particles. The results for the Ta2O5/Pt layer system reveal heating and electron excitation in the Ta2O5 layer during the first 2 ps. In the following the spot center behaves identical to the direct ablation of Pt. Here, the Ta2O5 is ablated with the Pt. A confined ablation where an additional amount of laser energy is deposited in the layer system or at the layer interface is assumed to take place. In the rim of the spot only the Ta2O5 is removed by indirectly-induced ablation at around 35 ns. © 2013 Copyright SPIE.

Involved external institutions

Hochschule für angewandte Wissenschaften München DE Germany (DE)

How to cite

APA:

Rapp, S., Rosenberger, J., Domke, M., Heise, G., Schmidt, M., & Huber, H.P. (2013). Time and space resolved investigations of confined fs ablation of Ta 2O5/Pt thin film systems. In Proceedings of SPIE - The International Society for Optical Engineering. USA.

MLA:

Rapp, S., et al. "Time and space resolved investigations of confined fs ablation of Ta 2O5/Pt thin film systems." Proceedings of the Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XVIII, USA 2013.

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