Manufacturing of 3D mechatronic systems with plasma technology

Schramm R, Franke J (2014)


Publication Type: Conference contribution

Publication year: 2014

Publisher: Apprimus Verlag

Pages Range: 117-123

Conference Proceedings Title: Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014

Event location: Vienna AT

ISBN: 9783863592011

Authors with CRIS profile

How to cite

APA:

Schramm, R., & Franke, J. (2014). Manufacturing of 3D mechatronic systems with plasma technology. In Thomas Gessner (Eds.), Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems - MEMS, NEMS, ICs and Electronic Components, SSI 2014 (pp. 117-123). Vienna, AT: Apprimus Verlag.

MLA:

Schramm, René, and Jörg Franke. "Manufacturing of 3D mechatronic systems with plasma technology." Proceedings of the Smart Systems Integration - 8th International Conference and Exhibition on Integration Issues of Miniaturized Systems: MEMS, NEMS, ICs and Electronic Components, SSI 2014, Vienna Ed. Thomas Gessner, Apprimus Verlag, 2014. 117-123.

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