Ideally hexagonally ordered TiO2 nanotube arrays

Sopha H, Samoril T, Palesch E, Hromadko L, Zazpe R, Skoda D, Urbanek M, Ng SW, Prikryl J, Macak JM (2017)


Publication Type: Journal article

Publication year: 2017

Journal

Book Volume: 6

Pages Range: 480-483

Journal Issue: 4

DOI: 10.1002/open.201700108

Abstract

Ideally hexagonally ordered TiO2 nanotube layers were produced through the optimized anodization of Ti substrates. The Ti substrates were firstly covered with a TiN protecting layer prepared through atomic layer deposition (ALD). Pre-texturing of the TiN-protected Ti substrate on an area of 20×20 µm2 was carried out by focused ion beam (FIB) milling, yielding uniform nanoholes with a hexagonal arrangement throughout the TiN layer with three different interpore distances. The subsequent anodic nanotube growth using ethylene-glycol-based electrolyte followed the pre-textured nanoholes, resulting in perfectly ordered nanotube layers (resembling honeycomb porous anodic alumina) without any point defects and with a thickness of approximately 2 µm over the whole area of the pattern.

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APA:

Sopha, H., Samoril, T., Palesch, E., Hromadko, L., Zazpe, R., Skoda, D.,... Macak, J.M. (2017). Ideally hexagonally ordered TiO2 nanotube arrays. ChemistryOpen, 6(4), 480-483. https://doi.org/10.1002/open.201700108

MLA:

Sopha, Hanna, et al. "Ideally hexagonally ordered TiO2 nanotube arrays." ChemistryOpen 6.4 (2017): 480-483.

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