Optical Properties and UV Sensing Response of Nitrogen-doped TiO2 Thin Film by CVD
Ng S, Siong Tneh S, Kwong Yam F, Hassan Z (2018)
Publication Type: Conference contribution
Publication year: 2018
Publisher: Institute of Physics Publishing
Book Volume: 1083
Conference Proceedings Title: Journal of Physics: Conference Series
Event location: Penang
DOI: 10.1088/1742-6596/1083/1/012025
Abstract
This work was demonstrated a cold-wall chemical vapour deposition (CVD) setup to prepare nitrogen (N)-doped titanium dioxide (TiO2) thin film on glass substrates, which presents semi-transparent yellowish surface. The prepared N-doped TiO2 film is homogeneous and possesses polycrystalline anatase structure. The transmittance measurement was carried out in the ultraviolet-visible spectral region to evaluate the film thickness, optical constants, and the optical band gap was determined by Tauc plot. A metal-semiconductor-metal (MSM) ultraviolet (UV) photodetector by the Pt/N-doped TiO2 film has shown a positive response towards UV illumination.
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APA:
Ng, S., Siong Tneh, S., Kwong Yam, F., & Hassan, Z. (2018). Optical Properties and UV Sensing Response of Nitrogen-doped TiO2 Thin Film by CVD. In Ahmad Fairuz Omar, Mohd. Zubir Mat Jafri, Shahrom Mahmud, Suhana Arshad (Eds.), Journal of Physics: Conference Series. Penang, MY: Institute of Physics Publishing.
MLA:
Ng, Siowwoon, et al. "Optical Properties and UV Sensing Response of Nitrogen-doped TiO2 Thin Film by CVD." Proceedings of the 6th International Conference of Solid State Science and Technology and Workshop on Advanced Materials Technology: Growth and Characterization, ICSSST AMTGC 2017, Penang Ed. Ahmad Fairuz Omar, Mohd. Zubir Mat Jafri, Shahrom Mahmud, Suhana Arshad, Institute of Physics Publishing, 2018.
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