Highly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films

Wagner S, Yim C, Mcevoy N, Kataria S, Yokaribas V, Kuc A, Pindl S, Fritzen CP, Heine T, Duesberg GS, Lemme MC (2018)

Publication Type: Journal article

Publication year: 2018

Journal

Nano Letters American Chemical Society

Book Volume: 18

Pages Range: 3738-3745

Journal Issue: 6

DOI: 10.1021/acs.nanolett.8b00928

Abstract

Two-dimensional (2D) layered materials are ideal for micro- and nanoelectromechanical systems (MEMS/NEMS) due to their ultimate thinness. Platinum diselenide (PtSe2), an exciting and unexplored 2D transition metal dichalcogenide material, is particularly interesting because its low temperature growth process is scalable and compatible with silicon technology. Here, we report the potential of thin PtSe2 films as electromechanical piezoresistive sensors. All experiments have been conducted with semimetallic PtSe2 films grown by thermally assisted conversion of platinum at a complementary metal-oxide-semiconductor (CMOS)-compatible temperature of 400 °C. We report high negative gauge factors of up to -85 obtained experimentally from PtSe2 strain gauges in a bending cantilever beam setup. Integrated NEMS piezoresistive pressure sensors with freestanding PMMA/PtSe2 membranes confirm the negative gauge factor and exhibit very high sensitivity, outperforming previously reported values by orders of magnitude. We employ density functional theory calculations to understand the origin of the measured negative gauge factor. Our results suggest PtSe2 as a very promising candidate for future NEMS applications, including integration into CMOS production lines.

Involved external institutions

Rheinisch-Westfälische Technische Hochschule (RWTH) Aachen DE Germany (DE) Universität der Bundeswehr München DE Germany (DE) Trinity College Dublin IE Ireland (IE) Universität Siegen DE Germany (DE) Universität Leipzig DE Germany (DE) Infineon Technologies AG DE Germany (DE)

How to cite

APA:

Wagner, S., Yim, C., Mcevoy, N., Kataria, S., Yokaribas, V., Kuc, A.,... Lemme, M.C. (2018). Highly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films. Nano Letters, 18(6), 3738-3745. https://doi.org/10.1021/acs.nanolett.8b00928

MLA:

Wagner, Stefan, et al. "Highly Sensitive Electromechanical Piezoresistive Pressure Sensors Based on Large-Area Layered PtSe2 Films." Nano Letters 18.6 (2018): 3738-3745.

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