UV excimer laser assisted heteroepitaxy of (Si)GeSn on Si(100)

Chiussi S, Stefanov S, Benedetti A, Serra C, Buca D, Schulze J, Gonzalez P (2014)

Publication Type: Conference contribution

Publication year: 2014

Journal

ECS Transactions Electrochemical Society

Publisher: Electrochemical Society Inc.

Book Volume: 64

Pages Range: 115-125

Conference Proceedings Title: ECS Transactions

Event location: Cancun MX

DOI: 10.1149/06406.0115ecst

Abstract

Fabrication of Photonic Integrated Circuits (PICs) using CMOS compatible direct bandgap Group-IV heterostructures is of increasing concern from scientific, technological, and economic point of view. Growth of group IV alloys, such as the Silicon- Germanium-Tin (Si-Ge-Sn) binaries and ternaries through CMOS compatible techniques is therefore of particular interest. This contribution presents UV-Laser based processes, such as Laser induced Chemical Vapor Deposition (LCVD) and Pulsed Laser Induced Epitaxy (PLIE) combined with conventional processing techniques, for material synthesis as well as results obtained growing different (Si)GeSn binary and ternary systems for material and lattice engineering. Synthesis of epitaxial (Si)GeSn alloys with above 10% Sn in large areas and of SiGeSn/GeSn micropatterns, through scanning and mask projection assisted PLIE, respectively, will be discussed. Emphasis will be placed on the influence of processing parameters on compositional and structural properties of the epitaxial alloys.

Authors with CRIS profile

Jörg Schulze

Involved external institutions

University of Vigo / Universidade de Vigo ES Spain (ES) Forschungszentrum Jülich / Research Centre Jülich (FZJ) DE Germany (DE) Universität Stuttgart DE Germany (DE)

How to cite

APA:

Chiussi, S., Stefanov, S., Benedetti, A., Serra, C., Buca, D., Schulze, J., & Gonzalez, P. (2014). UV excimer laser assisted heteroepitaxy of (Si)GeSn on Si(100). In Benjamin Vincent, Atsushi Ogura, David Harame, Matty Caymax, Seiichi Miyazaki, Guofu Niu, Bernd Tillack, Bernd Tillack, Alexander Reznicek, Marc Heyns, Gianlorenzo Masini, Krishna Saraswat, Yee-Chia Yeo, Junich Murota (Eds.), ECS Transactions (pp. 115-125). Cancun, MX: Electrochemical Society Inc..

MLA:

Chiussi, Stefano, et al. "UV excimer laser assisted heteroepitaxy of (Si)GeSn on Si(100)." Proceedings of the 6th SiGe, Ge, and Related Compounds: Materials, Processing and Devices Symposium - 2014 ECS and SMEQ Joint International Meeting, Cancun Ed. Benjamin Vincent, Atsushi Ogura, David Harame, Matty Caymax, Seiichi Miyazaki, Guofu Niu, Bernd Tillack, Bernd Tillack, Alexander Reznicek, Marc Heyns, Gianlorenzo Masini, Krishna Saraswat, Yee-Chia Yeo, Junich Murota, Electrochemical Society Inc., 2014. 115-125.

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