Local growth of graphene on Cu and Cu0.88Ni0.12 foil substrates

Funk HS, Ng J, Kamimura N, Xie YH, Schulze J (2017)

Publication Type: Conference contribution

Publication year: 2017

Publisher: Institute of Electrical and Electronics Engineers Inc.

Pages Range: 31-36

Conference Proceedings Title: 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2017 - Proceedings

Event location: Opatija HU

ISBN: 9789532330922

DOI: 10.23919/MIPRO.2017.7973386

Abstract

A method for large single-grain graphene growth on a Cu0.88Ni0.12-alloy using a local precursor feeding setup has been reported. Using back-end of line integration devices exploiting the high mobility and good mechanical properties can be built. However, few details about the actual local feeding setup and the yield are known. A local precursor feeding setup was implemented using a conventional tube-furnace, modified to allow local precursor feeding. Ar-diluted CH4 as the C precursor was fed through a quartz-nozzle, placed above the growth substrate. The influence of different growth-parameters was studied. Precursor flowrate, background-pressure, substrate material and nozzle-substrate distance were optimized for the experimental setup used. Local growth of polycrystalline graphene was achieved for small substrate-nozzle distance (2 mm) near atmospheric pressure (86.5 kPa) for low precursor flowrates (5 sccm). Local growth on both Cu and Cu0.88Ni0.12 is possible for these optimized parameters. Local graphene growth yield was found to be low. A possible explanation for the dependencies based on the fluid mechanics inside the furnace was found. An implementation of the local feeding setup was presented. Important parameters were optimized to allow local growth. Dependencies were studied to gain a better understanding of the local feeding growth mechanism.

Involved external institutions

University of California Los Angeles (UCLA) US United States (USA) (US) Universität Stuttgart DE Germany (DE) Nagoya University / 名古屋大学 JP Japan (JP)

How to cite

APA:

Funk, H.S., Ng, J., Kamimura, N., Xie, Y.H., & Schulze, J. (2017). Local growth of graphene on Cu and Cu0.88Ni0.12 foil substrates. In Marina Cicin-Sain, Filip Hormot, Tihana Galinac Grbac, Boris Vrdoljak, Edvard Tijan, Karolj Skala, Slobodan Ribaric, Stjepan Gros, Vlado Sruk, Mladen Mauher, Petar Biljanovic, Marko Koricic (Eds.), 2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2017 - Proceedings (pp. 31-36). Opatija, HU: Institute of Electrical and Electronics Engineers Inc..

MLA:

Funk, H. S., et al. "Local growth of graphene on Cu and Cu0.88Ni0.12 foil substrates." Proceedings of the 40th International Convention on Information and Communication Technology, Electronics and Microelectronics, MIPRO 2017, Opatija Ed. Marina Cicin-Sain, Filip Hormot, Tihana Galinac Grbac, Boris Vrdoljak, Edvard Tijan, Karolj Skala, Slobodan Ribaric, Stjepan Gros, Vlado Sruk, Mladen Mauher, Petar Biljanovic, Marko Koricic, Institute of Electrical and Electronics Engineers Inc., 2017. 31-36.

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