Gerwig M, Ali AS, Neubert D, Polster S, Bohme U, Franze G, Rosenkranz M, Popov A, Ponomarev I, Jank M, Viehweger C, Brendler E, Frey L, Kroll P, Kroke E (2021)
Publication Type: Journal article, Original article
Publication year: 2021
Book Volume: 7
Pages Range: 1-13
Article Number: 2000422
Journal Issue: 2
Open Access Link: https://onlinelibrary.wiley.com/doi/10.1002/aelm.202000422
Cyclopentasilane (CPS) has been studied as an liquid precursor for the deposition of thin silicon films for printed electronics and related applications. The processing involves a UV-induced prepolymerization of CPS followed by liquid deposition and low-temperature thermolysis. An insight into the oligomer and polymer formation including crosslinking in solution using Si-29 NMR spectroscopy and electron spin resonance spectroscopy is reported. Formation of SiH (T-units) and SiH3 (M-units) is observed as well as short-lived paramagnetic species. Additionally, the polymerization is followed by Raman spectroscopy. Reactive molecular dynamics simulations are applied to develop a theoretical model for the CPS-ring-opening and crosslinking steps. The experimental and computational data correspond well to each other and allow insight into the mechanism of polymer formation. The processing steps include spin-coating, thermal drying, and conversion to amorphous silicon, H-passivation, and fabrication of a CPS-derived thin-film transistor (TFT), without intermediate silicon crystallization. Further improvement is gained by using tetralene as a solvent, leading to a reduction of the time-consuming polymerization step by one order of magnitude compared to cyclooctane. The overall quality and characteristics of the CPS-derived spin-coated silicon thin films correspond to standard plasma enhanced chemical vapor deposition-derived devices with respect to performance levels.
APA:
Gerwig, M., Ali, A.S., Neubert, D., Polster, S., Bohme, U., Franze, G.,... Kroke, E. (2021). From Cyclopentasilane to Thin-Film Transistors. Advanced Electronic Materials, 7(2), 1-13. https://doi.org/10.1002/aelm.202000422
MLA:
Gerwig, Maik, et al. "From Cyclopentasilane to Thin-Film Transistors." Advanced Electronic Materials 7.2 (2021): 1-13.
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