Schaude J, Albrecht J, Klöpzig U, Gröschl AC, Hausotte T (2019)
Publication Language: English
Publication Type: Journal article, Online publication
Publication year: 2019
Book Volume: 86
Pages Range: 12-16
Journal Issue: S1
Open Access Link: https://doi.org/10.1515/teme-2019-0035
This article presents a new tilting atomic forcemicroscope (AFM) with an adjustable probe direction and piezoresistive cantilever operated in tapping-mode.The AFM is based on two rotational axes, which enable the adjustment of the probe direction to cover a complete hemisphere. The whole setup is integrated into a nano measuring machine (NMM-1) and the metrological traceability of the piezoresistive cantilever is warranted by in situ calibration on the NMM-1. To demonstrate the capabilities of the tilting AFM, measurements were conducted on a step height standard.
APA:
Schaude, J., Albrecht, J., Klöpzig, U., Gröschl, A.C., & Hausotte, T. (2019). Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode. Technisches Messen, 86(S1), 12-16. https://doi.org/10.1515/teme-2019-0035
MLA:
Schaude, Janik, et al. "Atomic force microscope with an adjustable probe direction and piezoresistive cantilevers operated in tapping-mode." Technisches Messen 86.S1 (2019): 12-16.
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