Geiger M, Rebhan T, Lutz N, Hutfless J (1993)
Publication Type: Conference contribution
Publication year: 1993
Conference Proceedings Title: Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications
Event location: Erlangen
APA:
Geiger, M., Rebhan, T., Lutz, N., & Hutfless, J. (1993). Processing of Compounds and Silica-Layers with an Excimer-Laser-Processing Centre. In Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications. Erlangen.
MLA:
Geiger, Manfred, et al. "Processing of Compounds and Silica-Layers with an Excimer-Laser-Processing Centre." Proceedings of the Proceedings of the EUREKA 205 International Workshop Excimer Laser Applications, Erlangen 1993.
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