Geiger M, Lutz N, Rebhan T, Hutfless J (1993)
Publication Type: Conference contribution
Publication year: 1993
Pages Range: 620-623
Conference Proceedings Title: Proceedings of Gas Flow and Chemical Lasers
APA:
Geiger, M., Lutz, N., Rebhan, T., & Hutfless, J. (1993). Quality Control during Excimer Laser Material Processing. In International Symposium on Gas Flow and Chemical Lasers (Eds.), Proceedings of Gas Flow and Chemical Lasers (pp. 620-623).
MLA:
Geiger, Manfred, et al. "Quality Control during Excimer Laser Material Processing." Proceedings of the Proceedings of Gas Flow and Chemical Lasers Ed. International Symposium on Gas Flow and Chemical Lasers, 1993. 620-623.
BibTeX: Download