Excimer Laser Processing of Ceramics Assited by a Diagnostic System

Geiger M, Lutz N, Biermann S (1991)

Publication Type: Journal article

Publication year: 1991

Journal

Proceedings of SPIE Society of Photo-optical Instrumentation Engineers (SPIE)

Book Volume: 1503

Pages Range: 238-248

Authors with CRIS profile

Manfred Geiger Technische Fakultät

Additional Organisation(s)

Institute of Manufacturing Technology

How to cite

APA:

Geiger, M., Lutz, N., & Biermann, S. (1991). Excimer Laser Processing of Ceramics Assited by a Diagnostic System. Proceedings of SPIE, 1503, 238-248.

MLA:

Geiger, Manfred, N Lutz, and S Biermann. "Excimer Laser Processing of Ceramics Assited by a Diagnostic System." Proceedings of SPIE 1503 (1991): 238-248.

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