The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations

Häublein V, Frey L, Ryssel H (2006)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2006

Book Volume: 866

Pages Range: 464-467

Event location: Marseille

ISBN: 0735403651

URI: https://www.scopus.com/record/display.uri?eid=2-s2.0-33846941211&origin=inward

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Häublein, V., Frey, L., & Ryssel, H. (2006). The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations. In Proceedings of the ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006 (pp. 464-467). Marseille.

MLA:

Häublein, Volker, Lothar Frey, and Heiner Ryssel. "The impact of mass resolution on molybdenum contamination for B, P, BF 2, and As implantations." Proceedings of the ION IMPLANTATION TECHNOLOGY: 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille 2006. 464-467.

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