Trench sidewall doping for lateral power devices

Berberich SE, Bauer A, Frey L, Ryssel H (2003)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2003

Publisher: IEEE Computer Society

Pages Range: 379-382

Article Number: 1256893

ISBN: 0780379993

DOI: 10.1109/ESSDERC.2003.1256893

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Berberich, S.E., Bauer, A., Frey, L., & Ryssel, H. (2003). Trench sidewall doping for lateral power devices. In Proceedings of the 33rd European Solid-State Device Research Conference, ESSDERC 2003 (pp. 379-382). IEEE Computer Society.

MLA:

Berberich, S. E., et al. "Trench sidewall doping for lateral power devices." Proceedings of the 33rd European Solid-State Device Research Conference, ESSDERC 2003 IEEE Computer Society, 2003. 379-382.

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