Häublein V, Frey L, Ryssel H (2002)
Publication Status: Published
Publication Type: Conference contribution, Conference Contribution
Publication year: 2002
Publisher: Institute of Electrical and Electronics Engineers Inc.
Pages Range: 217-220
Article Number: 1257977
ISBN: 0780371550
APA:
Häublein, V., Frey, L., & Ryssel, H. (2002). ENCOTION - A new simulation tool for energetic contamination analysis. In Proceedings of the 2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 (pp. 217-220). Institute of Electrical and Electronics Engineers Inc..
MLA:
Häublein, Volker, Lothar Frey, and Heiner Ryssel. "ENCOTION - A new simulation tool for energetic contamination analysis." Proceedings of the 2002 14th IEEE International Conference on Ion Implantation Technology, IIT 2002 Institute of Electrical and Electronics Engineers Inc., 2002. 217-220.
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