Kröner F, Schork R, Frey L, Burenkov A, Ryssel H (2000)
Publication Status: Published
Publication Type: Conference contribution, Conference Contribution
Publication year: 2000
Pages Range: 476-479
Article Number: 924191
Event location: Alpbach
ISBN: 9780780364622
DOI: 10.1109/.2000.924191
APA:
Kröner, F., Schork, R., Frey, L., Burenkov, A., & Ryssel, H. (2000). Phosphorus Ion Shower Implantation for special power IC applications. In Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000 (pp. 476-479). Alpbach.
MLA:
Kröner, F., et al. "Phosphorus Ion Shower Implantation for special power IC applications." Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000, Alpbach 2000. 476-479.
BibTeX: Download