Defects and gallium - Contamination during focused ion beam micro machining

Lehrer C, Frey L, Petersen S, Mizutam M, Takai M, Ryssel H (2000)

Publication Status: Published

Publication Type: Conference contribution, Conference Contribution

Publication year: 2000

Pages Range: 695-698

Article Number: 924248

Event location: Alpbach

ISBN: 0780364627

DOI: 10.1109/.2000.924248

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie (IISB) DE Germany (DE)

How to cite

APA:

Lehrer, C., Frey, L., Petersen, S., Mizutam, M., Takai, M., & Ryssel, H. (2000). Defects and gallium - Contamination during focused ion beam micro machining. In Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000 (pp. 695-698). Alpbach.

MLA:

Lehrer, C., et al. "Defects and gallium - Contamination during focused ion beam micro machining." Proceedings of the 2000 13th International Conference on Ion Implantation Technology, IIT 2000, Alpbach 2000. 695-698.

BibTeX: Download