Microanalysis of masklessly fabricated micro structures using nuclear microprobe

Park Y, Takai M, Nagai T, Kishimoto T, Seidl A, Lehrer C, Frey L, Ryssel H (1998)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1998

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Publisher: Elsevier

Pages Range: 373-378

DOI: 10.1016/S0168-583X(97)00709-X

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

Involved external institutions

Osaka University / 大阪大学 JP Japan (JP)

How to cite

APA:

Park, Y., Takai, M., Nagai, T., Kishimoto, T., Seidl, A., Lehrer, C.,... Ryssel, H. (1998). Microanalysis of masklessly fabricated micro structures using nuclear microprobe. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 373-378. https://doi.org/10.1016/S0168-583X(97)00709-X

MLA:

Park, Y., et al. "Microanalysis of masklessly fabricated micro structures using nuclear microprobe." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1998): 373-378.

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