Oechsner R, Kluge A, Frey L, Ryssel H (1991)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 1991
Pages Range: 793-797
DOI: 10.1016/0168-583X(91)95706-J
APA:
Oechsner, R., Kluge, A., Frey, L., & Ryssel, H. (1991). Tribological properties of carbonized photoresist. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 793-797. https://doi.org/10.1016/0168-583X(91)95706-J
MLA:
Oechsner, Richard, et al. "Tribological properties of carbonized photoresist." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms (1991): 793-797.
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