Gröschl AC, Köhnen S, Schaude J, Hausotte T (2018)
Publication Language: English
Publication Type: Conference contribution, Conference Contribution
Publication year: 2018
Publisher: VDE Verlag GmbH
City/Town: Berlin, Offenbach
Pages Range: 98-101
Event location: NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg
ISBN: ISBN 978-3-8007-4683-5
This article presents improvements of a new robust, precise, high-frequency focal-distance-modulated confocal point sensor for probing in coordinate measuring systems (CMS). While maintaining the known advantages of the confocal measurement principle, the sensor represents an innovative combination of a fibre-coupled confocal illumination and detection with a tuneable, acoustically driven gradient-index fluid lens (TAG lens) for modulation of the focus distance andanovelsignalprocessingutilizingalock-inamplifier. Thenewarrangementisabletoachieveanapproximatelylinear characteristiccurvefortheoptimisedfeedbackcontroloftheCMSinscanningsamplemode. Thisarticleemphasisesthe improvement of the lock-in amplification by using a custom signal processing on the basis of a field programmable gate array (FPGA).
APA:
Gröschl, A.C., Köhnen, S., Schaude, J., & Hausotte, T. (2018). Improvements of a high-speed focus distance modulated fibrecoupled confocal sensor for nanocoordinate measuring systems. In Proceedings of the SENSOREN UND MESSSYSTEME 19. ITG/GMA-Fachtagung (pp. 98-101). NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg, DE: Berlin, Offenbach: VDE Verlag GmbH.
MLA:
Gröschl, Andreas Christian, et al. "Improvements of a high-speed focus distance modulated fibrecoupled confocal sensor for nanocoordinate measuring systems." Proceedings of the SENSOREN UND MESSSYSTEME 19. ITG/GMA-Fachtagung, NürnbergConvention Center (NCC Mitte) Messezentrum 90471 Nürnberg Berlin, Offenbach: VDE Verlag GmbH, 2018. 98-101.
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