Frey L, Bogen S, Herden M, Ryssel H (1996)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 1996
Publisher: Taylor and Francis Ltd.
Book Volume: 140
Pages Range: 87-101
Journal Issue: 1
DOI: 10.1080/10420159608212943
APA:
Frey, L., Bogen, S., Herden, M., & Ryssel, H. (1996). Deep implants for semiconductor device applications. Radiation Effects and Defects in Solids, 140(1), 87-101. https://doi.org/10.1080/10420159608212943
MLA:
Frey, Lothar, et al. "Deep implants for semiconductor device applications." Radiation Effects and Defects in Solids 140.1 (1996): 87-101.
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