Photon assisted implantation (PAI)

Biró L, Gyulai J, Ryssel H, Frey L, Kormány T, Tuan N, Horváth z (1993)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1993

Journal

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms Elsevier

Pages Range: 607-611

Journal Issue: 80-81 Part. 1

DOI: 10.1016/0168-583X(93)96191-E

Authors with CRIS profile

Heiner Ryssel Technische Fakultät Lothar Frey Lehrstuhl für Elektronische Bauelemente

How to cite

APA:

Biró, L., Gyulai, J., Ryssel, H., Frey, L., Kormány, T., Tuan, N., & Horváth, z. (1993). Photon assisted implantation (PAI). Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 80-81 Part. 1, 607-611. https://doi.org/10.1016/0168-583X(93)96191-E

MLA:

Biró, L., et al. "Photon assisted implantation (PAI)." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 80-81 Part. 1 (1993): 607-611.

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