Gong L, Frey L, Bogen S, Ryssel H (1993)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 1993
Book Volume: 74
Pages Range: 186-190
DOI: 10.1016/0168-583X(93)95040-C
APA:
Gong, L., Frey, L., Bogen, S., & Ryssel, H. (1993). A novel delineation technique for 2D-profiling of dopants in crystalline silicon. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 74, 186-190. https://doi.org/10.1016/0168-583X(93)95040-C
MLA:
Gong, Li, et al. "A novel delineation technique for 2D-profiling of dopants in crystalline silicon." Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 74 (1993): 186-190.
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