Frey L, Ergele W, Falter T, Gong L, Ryssel H (1993)
Publication Status: Published
Publication Type: Journal article, Original article
Publication year: 1993
Book Volume: 21
Pages Range: 375-378
DOI: 10.1016/0167-9317(93)90095-M
APA:
Frey, L., Ergele, W., Falter, T., Gong, L., & Ryssel, H. (1993). Analysis of microstructured samples by focused ion beam sample preparation. Microelectronic Engineering, 21, 375-378. https://doi.org/10.1016/0167-9317(93)90095-M
MLA:
Frey, Lothar, et al. "Analysis of microstructured samples by focused ion beam sample preparation." Microelectronic Engineering 21 (1993): 375-378.
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