Characterization of metal impurities in silicon-on-insulator material

Frey L, Kroninger F, Streckfusse N, Ryssel H, Margail J (1992)

Publication Status: Published

Publication Type: Journal article, Original article

Publication year: 1992

Journal

Materials Science and Engineering B-Advanced Functional Solid-State Materials Elsevier

Book Volume: 12

Pages Range: 195-198

DOI: 10.1016/0921-5107(92)90285-H

Authors with CRIS profile

Lothar Frey Lehrstuhl für Elektronische Bauelemente Heiner Ryssel Technische Fakultät

How to cite

APA:

Frey, L., Kroninger, F., Streckfusse, N., Ryssel, H., & Margail, J. (1992). Characterization of metal impurities in silicon-on-insulator material. Materials Science and Engineering B-Advanced Functional Solid-State Materials, 12, 195-198. https://doi.org/10.1016/0921-5107(92)90285-H

MLA:

Frey, Lothar, et al. "Characterization of metal impurities in silicon-on-insulator material." Materials Science and Engineering B-Advanced Functional Solid-State Materials 12 (1992): 195-198.

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